Nanostructured Ferroelectric Films for Biosensors
|CHALMERS TEKNISKA HÖGSKOLA AKTIEBOLAG - Chalmers tekniska högskola
|Bidrag från Vinnova
|3 125 000 kronor
|september 2011 - augusti 2014
Syfte och mål
The overall purpose of the project is designing materials with desired properties for applications in devices and components with enhanced performances and new functionalities. The strong structure-property correlation of perovskite ferroelectrics is employed to ´design´ thin films possessing DC electric field induced piezoelectric effect. The goal of the project, development of the DC electric field controlled piezoelectric films, is achieved by selection of the materials composition and tailoring the film nanostructure via optimization of the growth conditions.
Resultat och förväntade effekter
The main results of the project are: Process of controllable growth of nano-columnar paraelectric films possessing dc field induced piezoelectric effect; Intrinsically switchable and tunable FBARs characterized highest tunability (4.4%, BF-BT), highest electromechanical coupling coefficient (13 % PMN-PT) and highest Q-factor (360, BST); Tunable liquid sensor for compressional and pure shear waves; Microfluidic system with sub-micrometer height and wide (up to 100m) channels.
Upplägg och genomförande
The project was executed according to the planned activities, milestones and deliverables, except for the tasks of integration of microfluidic system with the FBAR chips and complex measurements of the sensor in liquid exchange regimes. Originally development of the shear mode liquid FBAR sensors based on tilted c-axis films was planned. However, at the kickoff meeting it was decided to develop compressional mode liquid sensor instead of shear mode. Slovenian partner optimized the sol-gel process and produced nano-columnar PMN-PT films used by Chalmers in concept demonstrator.