Processes for MEMS by Inkjet Enhanced Technologies
| Reference number | |
| Coordinator | MICRONIC MYDATA AB (PUBL) |
| Funding from Vinnova | SEK 396 000 |
| Project duration | January 2013 - June 2016 |
| Status | Completed |
Purpose and goal
The goal of the Prominent project was to study the advantages of mask-free, digital, additive manufacturing technologies as a replacement for traditional subtractive processes that are widely used in MEMS-production today. The utilisation of additive methods can lower initial investment costs, offer greater production flexibility and realise new MEMS functionality. The work performed in the Prominent project focused on utilising innovative additive manufacturing technologies to build fourteen different demonstrators, where subtractive processes had been replaced.
Expected results and effects
A piezo-based rheometer that can characterise the flow properties of functional materials has been developed, such that correlations with processes that take place in non-contact deposition technologies, such as inkjet and jetprinting, may be obtained. Methods to analyse data obtained from the rheometer have been developed in parallell, and can be improved with further testing of new materials. The technology has been utilised to characterise an interconnect material that was used for a demonstrator in WP2 ´Low cost methods for via fill and 3D integration´ with Silex och TUT.
Planned approach and implementation
Mycronic´s primary role in the project was as a member of work package (WP) 6 ´Materials specifications, sourcing and testing´, where a technology was developed to characterise functional materials used for deposition purposes. Mycronic was also active during the later stages of the work performed in WP2 ´Low cost methods for via fill and 3D integration´ to perform jet printing of interconnect material on Through-Silicon-Via:s (TSV) filled by inkjet. Our efforts have resulted in demonstrators in both work packages, as well as conference presentations and scientific articles.