HOYA-Acreo: Implantation anneal furnace for SiC DMOSFET process optimization

Reference number
Coordinator Acreo AB - Acreo AB, Kista
Funding from Vinnova SEK 1 950 000
Project duration November 2009 - February 2011
Status Completed

Last updated 25 November 2019

Reference number 2009-04554

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