Disruptive GaN from Lund: Market introduction through pilot production in ProNano
|Coordinator||HEXAGEM AB - Hexagem AB, Lund|
|Funding from Vinnova||SEK 300 000|
|Project duration||November 2017 - March 2018|
Purpose and goal
The overall goal was to prepare our patented technology for scale-up and pilot production of commercially viable nanowire based GaN substrates. This goal was reached during the project and we are now ready to proceed to pilot production to enable delivery of evaluation wafers to customers and partners.
Expected results and effects
During the project we have scaled up the technology to a production process that guarantees full coverage of GaN on 2-inch substrates with minimal edge exclusion and thickness variations of less than 10%. Furthermore, we have demonstrated that the technology allows for production of significantly thicker GaN layers than previously possible.
Planned approach and implementation
During the project execution we have worked on internal processes to widen the parameter window to enable more consistent scale-up properties on industrially viable substrates. At the same time the patterning, in collaboration with our suppliers, has improved significantly resulting in better production stability.