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Disruptive GaN from Lund: Market introduction through pilot production in ProNano

Reference number
Coordinator HEXAGEM AB - Hexagem AB, Lund
Funding from Vinnova SEK 300 000
Project duration November 2017 - March 2018
Status Completed
Venture Innovative Startups

Purpose and goal

The overall goal was to prepare our patented technology for scale-up and pilot production of commercially viable nanowire based GaN substrates. This goal was reached during the project and we are now ready to proceed to pilot production to enable delivery of evaluation wafers to customers and partners.

Expected results and effects

During the project we have scaled up the technology to a production process that guarantees full coverage of GaN on 2-inch substrates with minimal edge exclusion and thickness variations of less than 10%. Furthermore, we have demonstrated that the technology allows for production of significantly thicker GaN layers than previously possible.

Planned approach and implementation

During the project execution we have worked on internal processes to widen the parameter window to enable more consistent scale-up properties on industrially viable substrates. At the same time the patterning, in collaboration with our suppliers, has improved significantly resulting in better production stability.

The project description has been provided by the project members themselves and the text has not been looked at by our editors.

Last updated 26 March 2019

Reference number 2017-03934

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