MultiPuls High-powered pulsed thin film deposition from multiple material sources
Purpose and goal
The purpose and goal of the project is that the project parties shall develop processes and hardware for production of multilayer structures as well as advanced multi-component thin films. Ionautics AB is a leading manufacturer of hardware used for High Power Impulse Magnetron Sputtering (HiPIMS) for thin film deposition. The research group Plasma and Coatings Physics at Linköping University is world leading in HiPIMS technology, which the group was the first to develop in the 1990´s.
Expected results and effects
The effects of a successful project are: - Ionautics increase the competitiveness by continuing selling front end technology for production of multilayer structures as well as advanced multi-component thin films to a world market. - The research group Plasma and Coatings Physics at Linköping University continuing being at the for front at the same time as the research gains the industri.
Planned approach and implementation
Ionautics will develop the new HiPIMS technology (hardware and software). The company is responsible for the industrial research as well as the design of the required hardware and software. The Plasma group will contribute with their expertize on advanced plasma-based technologies to synthesize new and better materials, which is required in order to show that the developed technology generates the desired process and improved material properties.