Infrared electro optical integration
Reference number | |
Coordinator | RISE Acreo AB - RISE Acreo, Göteborg |
Funding from Vinnova | SEK 200 000 |
Project duration | November 2016 - February 2017 |
Status | Completed |
Venture | The strategic innovation programme Electronic Components and Systems: |
Important results from the project
The main objective is to conduct a feasibility study within a strategic area for RISE Acreo and SenseAir: innovative concepts for future development of heterogenous micro-mechanical integration of sensors. Critical aspects for integration of electro-optical components in SenseAir nondispersive infrared gas sensor were successfully identified allowing for accurate and reliable packaging technique. This may allow for drastic improvement of sensor´s resolution providing more competitive solution compared to the existing scientific instruments based on laser spectroscopy.
Expected long term effects
Researchers with key skills from Acreo and SenseAir worked together to tackle the challenges associated with the integration of MEMS and optics in the same package. The results from this feasibility study showed that it is possible to i) use industrial viable packaging solutions for accurate alignment of electro-optical components, ii) replace the reflective optics, that collimates light in the sensor, with fully integrated refractive optics and gain improved sensor resolution.
Approach and implementation
The specific objectives of this feasibility project that were investigated, identified and chosen for prototype manufacturing and testing are: i) Generic and gas-tight integration and packaging platform of the MEMS IR emitter / detector and the optical lens regarding materials (packaging, attachment and electrical contacts), design and tolerances; ii) Refractive lens materials, design; iii) Manufacturing costs for prototyping and production.