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Eurostars project, UHV Piezo, E8938, PiezoMotor Uppsala AB

Reference number
Coordinator PiezoMotor Uppsala Aktiebolag
Funding from Vinnova SEK 4 072 000
Project duration November 2014 - December 2017
Status Completed
Venture Eurostars

Purpose and goal

The project goal was to develop actuator systems to be commercialized in different types of applications ranging from scientific instrumentation to the entire semiconductor market. Three different instruments for vacuum environment have been developed within the project and all are close to ready for commercial introduction. Essentially all goals have been reached and there are just some few technical details, e.g. increased lifetime in UHV, to be addressed.

Expected results and effects

The project has been carried out according to the initial plan with great success. Three different instruments based on the technology developed have been built and evaluated in the selected application. The performance is as good, or better than expected and the instruments will be prepared for market introduction. The project has also resulted in increased technical and application knowledge which will be beneficial for future business.

Planned approach and implementation

The E8938 UHV Piezo Eurika project had 4 participants: PIEZOMOTOR (PM), ALEMNIS (AL), EMPA and UPPSALA UNIVERSITY (UU). The Project had 7 work packages with designated leader for each WP. WP1 Specifications (AL), WP2 Guiding System(UU), WP3 Sensors and Control (PM), WP4 Actuator Development(UU), WP5 Actuator and-Module Manufacturing (PM), WP6 Integration of the actuator modules in demonstration Instruments for validation and qualification (AL) and WP7 Qualification of the instrument for material science (EMPA). The plan and a good cooperation ensured a successful execution.

The project description has been provided by the project members themselves and the text has not been looked at by our editors.

Last updated 19 March 2019

Reference number 2014-04150

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