Advanced lithography laser
| Reference number | |
| Coordinator | KUNGLIGA TEKNISKA HÖGSKOLAN - Institutionen för tillämpad fysik |
| Funding from Vinnova | SEK 300 000 |
| Project duration | October 2017 - February 2018 |
| Status | Completed |
| Venture | The strategic innovation programme Electronic Components and Systems: |
Important results from the project
With a positive result, the objective of the project to investigate whether a new laser concept based on solid state laser technology could be a possible replacement for the ion lasers Mycronic AB uses in its world-leading photo mask writers was met. This concept provides a laser that is smaller, cheaper, and much more energy-efficient than the ion lasers.
Expected long term effects
A compact energy efficient laser that can be developed to replace the Krypton-ion laser Mycronic AB today uses in their photo mask writers has been demonstrated. Experiments have shown the path to the next level of product development. Technical and marketing requirements have been developed. Different designs for packaging based on the demonstrator have been evaluated. Both the requirements profile and design are incorporated into the planning to take the development to the next level.
Approach and implementation
No significant deviations from the project plan.