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Advanced lithography laser

Reference number
Coordinator KUNGLIGA TEKNISKA HÖGSKOLAN - Institutionen för tillämpad fysik
Funding from Vinnova SEK 300 000
Project duration October 2017 - February 2018
Status Completed
Venture The strategic innovation programme Electronic Components and Systems:

Purpose and goal

With a positive result, the objective of the project to investigate whether a new laser concept based on solid state laser technology could be a possible replacement for the ion lasers Mycronic AB uses in its world-leading photo mask writers was met. This concept provides a laser that is smaller, cheaper, and much more energy-efficient than the ion lasers.

Expected results and effects

A compact energy efficient laser that can be developed to replace the Krypton-ion laser Mycronic AB today uses in their photo mask writers has been demonstrated. Experiments have shown the path to the next level of product development. Technical and marketing requirements have been developed. Different designs for packaging based on the demonstrator have been evaluated. Both the requirements profile and design are incorporated into the planning to take the development to the next level.

Planned approach and implementation

No significant deviations from the project plan.

The project description has been provided by the project members themselves and the text has not been looked at by our editors.

Last updated 25 November 2019

Reference number 2017-03558

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