Feasibility study on MEMS sensors for ultrasonic tightening control and monitoring of bolt joints

Important results from the project

Project goal is to investigate the possibility using MEMS based ultrasonic sensors for bolt joining inspection and control for Atlas Copco’s applications. During the project a conventional piezoelectric ultrasonic transducer, capacitive micromachined ultrasonic transducer (CMUT) and piezoelectric micromachined ultrasound transducers (PMUT) were studied and compared by Comsol simulations according to the specification from Atlas Copco. The sensor design and fabrication feasibility have also been addressed, which have laid foundation for applying following R&I project.

Expected long term effects

Sensors based on microelectromechanical systems (MEMS) can play a key role in miniaturization given the capabilities of today´s micro manufacturing technology. The main goal of this project is a feasibility study on MEMS based sensors to control and monitor the tightening of bolted joints in industrial processes. The outcome of the project indicated the promising that lead zirconate titanate (ZPT) based PMUT could meet the spec. provided by the Atlas Copco. The PUMT 1D/2D arrays, especially revealed potential/flexibility to apply them to the online industrial processing

Approach and implementation

The project has been divided into work-packages (WP) with detailed tasks, and the progress has been monitored and verified by milestones. The project work has been carried in close collaboration manner, and all team members met by Team meetings every week. All project partners have provided their contribution based on their complementary competence, and team has been solidly formed. A future collaboration plan has been agreed including a joint application to continue this work.