Ultrapure water for nanochip- and quantum chip production. Productification of Yield Enhancement Tool, YET

Important results from the project

The project aimed to develop a so-called Prototype 2 on a clean water module that generates absolutely clean water for cleaning silicon wafers in the semiconductor industry. The prototype must be mobile and as far as possible correspond to the end product. The starting point is a preliminary URS. P2 must be designed externally to function in customers´ clean room facilities, and be equipped with relevant connections. P2 shall be provided with a dispensing module. which transfers water from the water module to the surfaces of the silicon wafers without contaminating the water.

Expected long term effects

2.2 Results and expected effects The project resulted in the delivery of P2 in full compliance with the specifications specified in aim and objective. The project´s aim was to develop a prototype P2 on the clean water module developed in the completed Innovativa Startups 1. This is mainly built in collaboration with the external consultant Reilers. The prototype was delivered in good time according to the project plan and is now installed at the Electrum Laboratory.

Approach and implementation

2.3 Layout and implementation analysis The project´s approach was to work closely with the technology consultant Rejlers. This collaboration worked excellently to the extent that the consultant was sensitive to the adjustments and additions that arose during the work. Furthermore, approval processes took place before and after installations in an exemplary manner. The target consists of two intimately intertwined parts: 1. To build a module (based on membrane tillation) that generates nanoreal water (in practice without contaminants greater than 3 nm.