EuroPAT-MASIP
| Reference number | |
| Coordinator | Advanced Vacuum Distribution Europe AB |
| Funding from Vinnova | SEK 9 672 442 |
| Project duration | April 2017 - December 2020 |
| Status | Completed |
Purpose and goal
Advanced vacuum AB, EuroPAT MASIP member, has developed and assessed the leading plasma dicing solution. The system is composed of 3 different sub-assemblies: the transfer module, the process module, main core of dicing process, the facilities module with all control elements i.e. RF generators, mass-flow and heating controllers. The system was assessed with members as FhG for exposed metals validation, Ketek for new generation silicon photomultiplier and Valeo for New Generation Camera Module.
Expected results and effects
Primary target markets are small devices such as discrete devices, passives for which our technology can enable cost reductions and yield improvements. Secondary markets are devices which demand high level of dicing quality or new die shapes which cannot be diced by other methods. Market trends are thinner, smaller devices and higher quality. Plasma dicing is well position to meet these trends, provide customer new dicing capabilities to create new die shapes, lower cost and improve quality
Planned approach and implementation
Management: P. Christensen CEO Advanced Vacuum, C. Johnston and J. Perrocheau. Main Advanced Vacuum Engineers, D. Ertsas, J. Wermenstam, S. Nilsson, V. Tsimbalistöi and M. Kvist. Main engineers in France: S. Ferrand, V. Marcot, P. Morin and M. Cottat. The system we build in Sweden was transferred to our facility in France Grenoble to continue all assessment and associated development of software and hardware. This is the reason we have had four French engineers working for us in the project in France.