E!113749, LPCVD, Kiselkarbid i Stockholm AB
| Reference number | |
| Coordinator | Kiselkarbid i Stockholm AB |
| Funding from Vinnova | SEK 4 292 000 |
| Project duration | April 2020 - June 2025 |
| Status | Ongoing |
| Venture | Eurostars |
Purpose and goal
KISAB has developed the FSGP-M process which enables production of high quality silicon carbide substrates. In this project a CVD-process is developed for the production of source material used in the FSGP-M process.
Expected effects and result
Substantially lower cost for the manufacturing of high quality silicon carbide substrates.
Planned approach and implementation
During the project, a highly efficient process is developed, which lowers the cost of source material through the application of a new reactor principle.