Chips JU 2024 IA ACT10
| Reference number | |
| Coordinator | Excillum AB |
| Funding from Vinnova | SEK 2 854 999 |
| Project duration | October 2025 - September 2028 |
| Status | Ongoing |
| Venture | Chips JU |
Purpose and goal
The ACT10 project is essential in realizing the 10Å node as it develops and demonstrates required technology options, including their integration. At high-level, the project´s activities include semiconductor manufacturing equipment, computer aided design tooling & libraries, process technology and metrology development. Excillum is further developing the unique liquid-metal-jet X-ray source technology, specifically optimized for small spot (HR)XRD applications.
Expected effects and result
The target group are OEMs within semiconductor, other industries and academic research. The direct economic impact is expected to be continued growth of Excillum´s revenue from 12 MEUR in 2023 to the 50 MEUR level in 2029, with an expected doubling of number of employees from 80 to 160. The indirect impact of system sales of our OEM customers and of enabling new semiconductor technology and higher yield in battery manufacturing is of course much larger but very difficult to estimate.
Planned approach and implementation
M1: ACT10 Kick-off Meeting M30: Milestone: Improved Liquid Metal Beam (LMJ) performance after continuous upgrades confirmed. M36: Delivery: First BSoTA X-ray source ready for delivery to BRT