Ultrapure water for mass production of nanochips. Prototype development of tool for yield enhancement, YET

Purpose and goal

Our goal was to develop a prototype that demonstrates that nano-pure water can be produced in sufficient quantity for a washing process and that this can be validated using a proprietary analytical method

Expected results and effects

The development has exceeded expectations and has generated a prototype that produces the relevant amount of nano-pure water and also, the world´s only known analytical method that verifies the purity of the water in liquid form. In the past, reference has been made to evaporating the water and studying this under an electron microscope, which is not useful in mass production. We have used this method to ensure that the results of our own analysis are correct. We also discovered during the development that the absolutely pure water to our delight is extremely aggressive as freshly produced

Planned approach and implementation

Technical development has taken place at our technology consultant Rejler. Critical activities has been to prevent any leakage and cross-contamination between input water and freshly produced pure water. This has required the presence of our technology manager. The analysis method was developed in collaboration with Anton Paar GmbH and took place at Electrumlab. In the critical stages the prototype was shipped to Kista to be able to produce nano-pure water just before analysis to investigate to what degree "inert" material (vessel walls) is affected by the aggressive nanopure water