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Smart Plasma Deposition Control of Physical Vapor Deposition (PVD) Processes for the Semiconductor Industry
| Reference number | 2025-03918 |
| Coordinator | Ionautics AB |
| Funding from Vinnova | SEK 2 967 945 |
| Project duration | May 2026 - April 2028 |
| Status | Ongoing |
| Venture | Joint R&D projects for small and medium-sized enterprises in Sweden-Germany |
| Call | German-Swedish Call for joint R&D projects by Small and Medium-sized Enterprises spring 2025 |
Last updated 17 March 2026
Reference number 2025-03918
