Breakthrough green technology in Nanostructures Miniaturization for Electronic Chips

Important results from the project

AlixLabs AB, a nanotechnology startup based in Lund has accomplished to fabricate and characterize the first electrical device that is fabricated using APS technology by the use of Vinnova grant. The achieved milestones can be categorized in 3 sections: I) Developing EBL for patterning nanostructures followed by proper down etching for a desired sidewall inclinations II) Splitting nanostructures using two different approach, atomic and molecular activation process III) Fabrication of electrical device and performing electrical characterization

Expected long term effects

The main outcome of this project was to fabricate an electrical device that the APS technology was the main step through the fabrication process. It is important for us the demonstrate that the APS is a reliable, cost efficient and green technology for chip production and the most basic step was to have the first prototype fabricated. By having the electrical data, we have positioned ourselves one step closer to the market and potential costumers.

Approach and implementation

We are satisfied with the design and implementation of the project. The patterning of the structures EBL is of great quality, despite being a challenging process. Also, contacting the nanostructures was done in a very accurate way so that we could collect electrical data for 6 different configurations from a single device. We managed to produce electrical data in the last stage of the project, hence there are rooms left for improving the process further. One improvement that can be done is to enhance the damage of the devices that occur during APS process.