Novel MEMS Microphone Packaging Technology for an Inner Ear Microphone

Important results from the project

** Denna text är maskinöversatt ** Researchers at the division of Thin Film Physics at Linköping University, together with Swiss and Belgian industrial and academic partners, have developed methods for manufacturing extremely thin membranes for use as sound receptors in a fully implantable hearing aid. The goal to produce titanium membranes, with 1 µm thickness and 500 µm diameter, that are completely free of mechanical stress while also acting as a hermetical biocompatible border to the inner ear, was achieved thanks to advanced methods for material synthesis and analysis at LiU.

Expected long term effects

** Denna text är maskinöversatt ** In this project, many materials technology problems have been identified and solved while we explored new types of titanium-based nanotechnological membranes that show very promising results in terms of biocompatibility and sound receiving properties. Sound receptor membranes that can be implanted in the cochlea will enable 100% implantable hearing aids and will give people with hearing impairment a significantly greater perceived freedom. The demand is considered to be very large and thanks to this project we are one step closer to such a product.

Approach and implementation

** Denna text är maskinöversatt ** By analyzing membranes, from previous experiments, with advanced electron microscopy, several sources of error could be identified and fed back to our Swiss and Belgian project partners for correction in their processes. At the division of Thin Film Physics at Linköping University, the causes of various stress developments in the membranes during real-time production were then investigated. This led to an understanding of the problem and suggestions for improved production at Swiss Neutronics, which is the industrial project partner.