Enabling Functional Material analysis by development of a novel hard X-ray microscopy setup
| Reference number | |
| Coordinator | Excillum AB |
| Funding from Vinnova | SEK 3 000 000 |
| Project duration | October 2021 - December 2023 |
| Status | Completed |
| Venture | Joint R&D projects for small and medium-sized enterprises in Sweden-Germany |
| Call | German-Swedish Call for joint R&D projects by Small and Medium-sized Enterprises spring 2021 |
Important results from the project
The EMaX project succesfully demonstrated very-high-resolution projection X-ray microscopy at higher energy (24 keV) than previously available with lab-based systems as published in “Laboratory X-ray Microscopy of 3D Nanostructures in the Hard X-ray Regime Enabled by a Combination of Multilayer X-ray Optics” (https://doi.org/10.3390/nano14020233).
Expected long term effects
The project successfully demonstrated 24keV X-ray microscopy and its performance on relevant semiconductor samples.
Approach and implementation
There was a smooth communication and overall good collaboration between all partners of the Swedish-German consortium during project implementation.