mag-MEMS
| Reference number | |
| Coordinator | Silex Microsystems AB |
| Funding from Vinnova | SEK 2 918 756 |
| Project duration | May 2012 - February 2014 |
| Status | Completed |
Purpose and goal
Optimization of new magnetic matrl. for the GHz range for RF MEMS / IPD applications developed & demonstrated up to 3.7 GHz (capable to meet mobile phone requirements spec). Intense IPR and intelligence business cases = > possible by new technologies for new MEMS business. IP secured via two patents pending and one new granted U.S. / EU reg Trademark. SmartBlock®. Established new international customer and supplier contacts. Integration of new advanced materials in existing Silex manufacturing platforms ready. Roadmap for ramping to volume production established.
Results and expected effects
World-leading performance on NiFe magnetic materials for RF MEMS applications outlined. Expected to provide new customers and broader technology base. Hopefully generating new employment hiring as well.
Approach and implementation
Market analysis of magMEMS circuits = > choice of demo (RF and IPD with NiFe as magnetic materials in 3D TSV and TGV inductors) delaying mag-MEMS for compasses. Ecosystems: establ. of partners = > process technology and RF expertise with access to the necessary RF lab strengthens silex position in RF MEMS manufacturing. Material dev. in Silex 8 ´fab with support of external partners. Demostartor of new magnetic Matl fabricated and new TSV / TGV tech. for high-performance RF inductors incl theory models with the help KTH student. Publ & exploitation in conf / fairs including customer visits.